Vol 2 Chapter 438 Lithography machine project another way

It took Mu Yang more than two hours to study the updated reading system, and he was so excited that he couldn’t sleep.

After drinking a cup of tea, he wanted to see the core equipment of chip manufacturing technology: lithography machine.

At present, there are two mainstream lithography machines on the market, one is DUV lithography machine and the other is EUV lithography machine. DUV is deep ultraviolet ( ), EUV is extremely deep ultraviolet ( ).

From the perspective of process range, DUV can basically only achieve 25n. Intel has achieved 10n by virtue of the dual-bench mode, but it cannot reach 10n.

Only EUV can meet the wafer manufacturing under 10n, and it can continue to extend to 5n3n.

This line width is actually related to the line width of light, such as the G line of visible light, that is, if 436n is used for etching, the line must be very wide.

It can be simply considered that the optical system of a lithography machine is actually a paintbrush. Different lights represent refills of different thicknesses. A thinner pen (light) can draw thinner and more complex pictures.

DUV is a colored pen, and EUV is a gel pen. The lines of the gel pen are thinner and easier to use.

With this understanding, it is easy to understand how the lithography machine etches the circuit diagram.

At present, the foreign brands of lithography machines are mainly the three major brands of ASML, Nikon and Canon.

The price of EUV is 100-300 million US dollars per unit, and the price of DUV is 20 million-50 million US dollars per unit.

The current advanced lithography system is the EUV lithography machine. If Mu Yang plans to take the EUV lithography machine route, he must not bypass the protection scope of other people’s technology patents.

Therefore, he can only look for a lithography machine with another type of light, and at the same time, he must consider the resolution of light, alignment accuracy, exposure method, wavelength of light source, uniformity of light intensity, production efficiency and other indicators.

As far as resolution is concerned, if the circuit diagram produced is blurred, the chip must be bad.

Other indicators of the lithography machine can also be compared to the performance of a brush.

It’s not that Muyang can’t make lithography machines anymore, it just means that if we develop DUV and EUV lithography machines, we can’t get around the technical patent protection scope of the above three companies.

Therefore, he could only find another way.

A long time ago, Mu Yang thought of an electron beam lithography machine.

Originally, a few years later, a laboratory in the beautiful country developed a lithography system called ZyvexLitho1, which was based on an STM scanning tunneling microscope and used EBL (E-Beaithography) electron beam lithography to produce a 0.7 N-width chips just cannot be mass-produced, or the cost is too high.

Mu Yang believes that if it is an electron beam lithography machine with mature technology, the line width will be smaller than 0.7n.

He silently searched for “electron beam lithography machine” on the ordinary shelves of the system store, and soon found several related technologies.

Muyang chooses a technology suitable for his company: EBL01

technical parameter:

1. Minimum line width: less than 1nbr/>

2. Acceleration voltage: 5-500kV

3. Electron beam diameter: less than 0.5nbr/>

4. Overlay accuracy: 1nan+0.20)

5. Stitching accuracy: 1nan + 0.20)

6. Processing wafer size: 4-18 inches

7. Scanning electron microscope resolution: less than 0.2nbr/>

main feature:

1. TFE electron gun with ultra-high brightness and ultra-high stability;

2. Excellent electron beam deflection control technology;

3. Using field size modulation technology, the electron beam positioning resolution can reach 0.0002n

4. Using axisymmetric graphic writing technology, the resolution of graphic deflection can reach 0.002ad;

5. Wide range of applications, such as

Micro-nano device processing, mask manufacturing for research, nano-fabrication (such as single electronic devices, quantum device manufacturing, etc.), hybrid lithography in high-frequency electronic devices, graphic line width and graphic displacement measurement, etc.

…..

Achievement points required: 300 points!

….

Mu Yang roughly glanced at the introduction, and he could see its advanced nature from the technical parameters alone.

There are also more advanced lithography machines, but with the current conditions of the Xinghai Group, they cannot be manufactured even if they are bought, and they need a lot of achievement points.

This EBL01 claims to be able to manufacture chips under 1n, but the cost of mass production will be relatively high.

Therefore, under the current situation, Xinghai Group can start from the 7n chip process, and can guarantee to maintain the world’s first position before 2018.

When competitors can produce 7n chips in batches, Xinghai Group will launch 5n3n chips.

Some equipment applications do not need such high-end chips. The 28n chip process is sufficient, and it will be the mainstream in the next ten years.

It’s just that Mu Yang doesn’t plan to play with low-end chips.

In addition, Mu Yang plans to get some chips smaller than 1n for the manufacture of quantum computers and supercomputing. He plans to use such chips for himself.

Next, Muyang confirmed the purchase of EBL01 technology.

Ten minutes later, Mu Yang finished absorbing the EBL01 technology.

He feels that he has a deeper understanding of lithography machines, and now he is a real top expert in chip manufacturing.

After buying the lithography machine technology, Mu Yang has to purchase chip design technology, chip design-related software and related equipment.

He doesn’t plan to develop the chip design software by himself. He is weak in chip software design, and he doesn’t know how long it will take to research it by himself.

Moreover, the current situation of the company is severe. Once Beautiful Country knows that its company is engaged in chips, it will impose various restrictions on Xinghai Group.

Mu Yang is in a hurry now, and there are more important things that he needs to deal with personally.

So, he spent another 400 achievement points.

This night, Mu Yang spent 700 achievement points, and he still felt a little distressed.

After absorbing the new technology, Mu Yang was really sleepy, so he went back to bed to rest.

The next day, Mu Yang was woken up by Song Xuelu slapping his face.

“Happy birthday, daddy.”

“Thank you, it’s good to have you.”

Mu Yang opened his hazy eyes, and embraced his wife’s slender waist.

His wife was born in the same year as him, only a few months younger than him.

When the system is at level 8, the store has medical technologies such as beauty treatment and anti-aging. Mu Yang hopes to develop them within 20 years and use them on his wife.

“I see you are quite tired, what time did you go to bed last night?”

“Looks like it’s past three o’clock in the morning.”

“It’s so late, what’s the trouble?”

“It’s not a worry, but I suddenly thought of some inspiration, so I got up and recorded it.” Mu Yang rubbed his wife’s hair and said.

“Oh, it’s only past seven o’clock, you can continue to sleep for a while.”

Mu Yang nodded, continued to catch up on sleep, and didn’t get up until nine o’clock.

Today is his birthday, and he didn’t hold any celebration ceremony. He doesn’t like to do this kind of thing. Now the family is not short of money, and the food and drink are the best. Every day is like a holiday.

Had breakfast and stayed with the kids for a while.

Now the child can already call his father, but the pronunciation is not clear enough.

He tested the loyalty of several babysitters and servants who looked after the children.

Loyalty cannot be tested at a glance, it takes about a few seconds, and the person to be tested is within a few meters of Muyang.

A numerical value the size of a fist will appear above the head of the person being detected. Values ​​over 70 are all green, and the higher the value, the darker the color.

In the end, their loyalty was between 80 and 85, which reassured Mu Yang, he was most afraid that a certain servant would have bad intentions for his child.

However

After that, Mu Yang tested his bodyguards again and found that the loyalty was much higher, all above 88.

The bodyguards have been following him for a long time, and they have a good relationship with him. Mu Yang treats them well, and it is normal for them to be more loyal.

At the same time, Mu Yang discovered that after he tested ten people, he found that his system money was actually 10 million less.

It costs one million system money to test a person’s loyalty?

If this is the case, Mu Yang can still accept it, but if it is not an important backbone and important personnel of the company, then there is really no need for testing.

He earned one million yuan casually, but it was not easy to get one million system money. Maybe this system money will be of greater use in the future.

For his family, Mu Yang didn’t want to test his loyalty, nor did he think about it.

If you have that thought, it means that you no longer trust your family members.

The next day, the company went to work normally.

Mu Yang took advantage of the new year to hold a meeting of middle and high-level management. In fact, he wanted to test the loyalty of all middle and high-level management. In the end, he found that they were all between 80 and 90. For example, Zhou Chen and Zhang Xiaofeng’s loyalty to him reached Got 90.

There are no spies in the management, and Mu Yang no longer has the previous worries.

Under normal circumstances, Mu Yang doesn’t need to go to any meetings anymore, and now the group president Zhou Chen is in charge of the company’s affairs, and now he feels more at ease.

After Muyang tested the loyalty of the management, he walked around the technical departments and laboratories, and tested the core personnel of important departments, and found that most employees have loyalty between 70 and 85.

In this round of testing, Mu Yang really found two abnormal values, both of which were senior software engineers, with loyalty values ​​of 17 and 19 respectively, and the color of the loyalty value above his head turned red, both of which were in the industrial software department. The company is less than a year old.

The technology of other departments is not good, but the core code of software is really much easier to steal. However, the company protects this kind of core technology very well, not to mention ordinary employees, even the management of industrial software. Hard to reach.

After Mu Yang wrote down the other party’s name, he returned to the office and found Lai Chunqin, the personnel director. She was promoted from the personnel manager to the director level last year.

After Lai Chunqin arrived at his office, Mu Yang handed her a note and said solemnly, “Boss Lai, help me carefully check the background and origin of these two people, and pay attention to their movements.”

“Chairman, do you suspect that they are spies?” Although it was the first time Lai Chunqin had heard such an explanation from the chairman, as the director of personnel, she was in charge of recruiting personnel, and she was very vigilant. Many schemes tried to sneak into Xinghai Group, She also reminded her subordinates like this.

Mu Yang’s face was solemn, and he found an excuse at random: “Yes, you are right, the possibility of being a spy is relatively high, and if it is true, the danger is relatively high.

Ask the security department to check the historical videos of the two people, and if they find that there are really detrimental actions against the company and it is already illegal, then call the police;

If not, find a way to quit, and don’t need to be transferred to a non-core department. We don’t have the heart to play cat and mouse games with them. Who knows when they will cause havoc. ”

“OK.”

Lai Chunqin nodded, and didn’t ask how the chairman found out, who told him that she should not ask.

After she left, she asked Fang Xue, the personnel manager, to seriously investigate the situation of the two of them.

The company’s offices and laboratories are equipped with high-definition cameras, which is not an infringement of employees’ privacy.

There is also employee behavior data analysis software designed by Mu Yang, which can directly lock the video of a certain person. Under normal circumstances, this will not be used. Only the management and senior management of the personnel department know about this thing, and it has not yet been opened in the security department.

Every employee has recorded face recognition, so this software has the locking function.

It only took half a day to review, and the results came out.

I did a background check and found nothing.

But when I checked the video, I found that the whereabouts of the two, especially after working overtime at night, were a bit sneaky.

The company can’t dismiss employees without reason, but the compensation is in place, and the employees can’t say anything.

On the morning of January 3, Chen Yifang, a senior software engineer who was investigated, came to the HR department to ask the HR manager to question:

“Why did you fire me? I didn’t make any mistakes. I work hard every day.”

“I’m sorry, this is the decision of the higher authorities. The company will compensate you for the loss.” Fang Xue, the personnel manager, said apologetically, and she couldn’t say anything without evidence. Boss Lai entrusted this matter to her, and this was the only way to go.

The other employee, on the contrary, didn’t say anything, and agreed directly, probably because he knew the reason. The Xinghai Group didn’t want to tear it apart, and there was no evidence for it yet.

“I don’t want any compensation, I just want to stay in the company and continue to do it.”

“Chen Fangfang, in fact, there is no need for everyone to waste time. Although I don’t know the reason, there must be a reason. Xinghai Group will not dismiss employees without reason. You should go back and think about it.”

When Chen Fangfang heard this, he had no choice but to leave the personnel department angrily, and asked for leave for half a day.

He left the range of Xinghai Group and made a secret phone call.

“Have your actions been discovered?”

“Probably not. I have been in Xinghai Group for nearly a year, and I have not taken any action at all. If I am not sure, I will not do it easily. Xinghai Group’s technology is kept very secret. The core code of AD software, let alone Experts, even technical managers, are hard to come by, and it is said that Mu Yang wrote it himself.”

“With such a large workload, Mu Yang is unlikely to write it himself. It is possible that he has another technical team, but you don’t know it. Since he suspected you, but did not explain the reason, saying that the Xingxinghai Group did not find evidence, you leave It’s useless to come down, come back, the company needs you.”

Chen Fangfang knew that the boss didn’t believe in Mu Yang’s magic, and he didn’t want to explain too much, so he thought for a while and sighed: “Okay.”

Under normal circumstances, Xinghai Group’s treatment is really good, he doesn’t want to leave, and after New Year’s Day, the company will officially issue equity incentives to employees from overseas Hummer companies.

However, there are some things that money cannot justify.

If he betrayed his boss, he and his family would end badly, which he didn’t want to try.

That afternoon, he approached the personnel manager Fang Xue again and agreed to resign~www.readmtl.com~ and moved out of Xinghai Group the next day.

When Mu Yang received Lai Chunqin’s report again, he said solemnly: “Yes, I got it.”

Although the two people who were expelled were just two little people, Mu Yang had to pay attention to it. After all, a grain of rat droppings can dirty a pot of soup.

After the upgrade, Muyang is very busy, with many plans to implement, and after New Year’s Day, it is very close to the Spring Festival this year. January 30th is New Year’s Eve. The company plans to officially take the annual holiday on January 24th, and he has more things to do.

This year is the same as last year, the annual meeting and the New Year’s Eve dinner are held on the same day, and the annual meeting is held on the company’s basketball court.

The research and development cycle of chip manufacturing equipment will be relatively long. The equipment of EBL electron beam lithography machine is complicated, but the difficulty lies not in the structural complexity, but in the fact that many parts are difficult to find in the market. They can only be customized from manufacturers. On the one hand, due to the small production volume and not many manufacturers, there may be only one company in the world that produces a certain component, and the other party may not necessarily sell it to Xinghai Group. The most difficult part is here.

If you can’t get customization, you can only develop and produce it yourself, which will lengthen the entire research and development cycle.

Mu Yang thought about it, the chip is the company’s top priority, and it is also related to the future intelligent layout.

As long as it is an imported component that is not easy to purchase, the company still finds a way to develop and produce it independently, so as not to be stuck by foreigners.

First build an electron beam lithography machine, and then start chip design when the progress is almost the same, step by step.